ELT 211 - Semiconductor Process Technology

Credits: 3
Lecture Hours: 2
Lab Hours: 2
This course provides a detailed overview of semiconductor device fabrication. Topics include a review of semiconductor physics and device operations, device fabrication and various process modules. Process modules will focus on vacuum technology, silicon wafer, lithography, deposition, hot process, doping, etching and metallization. Challenges in process integration and device technology will also be discussed. Students are also required to participate in field trips.
Prerequisite(s): CHE 111 and ENT 102, or ELT 108